DECOR TWO-CHAMBER VACUUM ARC FACILITY
Field of application:
Commercial deposition of functional coatings: wear-resistant, anti-corrosive, heat-resistant, protective, decorative in aпїЅwide range of colors. Deposition ofпїЅcoatings from various metals and their nitrides, oxides and carbides.
|Maximum consumed power, kW||100|
|Background pressure, Pa||6,7 х 10-4|
|In-chamber heating power, kW||40|
|Ion cleaning sources, Current, mA||150|
|Ion cleaning sources, Voltage, kV||5|
|Arc sources, Current, A||60|
|Arc sources, Voltage, V||30|
|Maximum water flow rate, m³/s||3|
1. M.V. Gordienko, V.V. Ivanov, D.A. Karpov et al., Two-chamber vacuum-arc plant "DECOR" for deposition of functional and decorative coatings. Plasma Devices and Operations, 1997, vol. 5,pp. 227-237.
|DECOR two-chamber vacuum-arc facility||1994||Svetlana Industrial Association||Russia|