PLASMATEKH-M FACILITY
The facility is designed for development and investigation of novel ion-plasma nanotechnologies, as well as for realization of ion nitriding and coating deposition technologies for various commercial products.
Capabilities:
Ion nitriding, plasma surface treatment and coatings deposition to improve materials surface properties:
- wear-resistant,
- anti-corrosive,
- heat-resistant,
- protective,
- anti-emission,
- decorative.
These properties are ensured by ion nitriding and coating deposition of:
1. any metals
2. metal nitrides
3. metal carbides
4. metal oxides
5. carbon coatings
The methods used:
• ion nitriding
• treatment in glow and abnormal glow discharge
• treatment by cathode spots of vacuum arc
• vacuum arc coating deposition (with/without macroparticles filtering)
• magnetron coatings deposition (stationary and pulsed mode including HIPIMS technology)
Facility composition and technical characteristics:
• Water-cooled vacuum chamber 1 m3 in volume
• Oil free vacuum pumping system ensuring background pressure of 5x10-5 Pa
• System for in-chamber heating of samples with temperature control
• Technological gas supply system (four channels)
• Substrate bias supply system
• System of ion and plasma treatment of samples (glow and abnormal glow discharge, vacuum arc plasma, special ion sources)
• System of plasma coatings deposition (filtered/unfiltered arc sources and magnetron sources)
Features: Possibility to realize ion and plasma treatment of materials surfaces, coatings deposition processes and their different combinations.
Diagnostic and accessories:
• Scanning electron microscope Phenom 3G ProX with x100,000 magnification and determination of the chemical composition of the samples (both conductive and non-conductive materials).
• Metallographic microscope METAM LV-41 with x2000 magnification and possibility of digital imaging for processing and analysis.
• Tribometer Calowear (CSM Instruments) for determination of the coatings thickness (> 100 nm) and coatings wear resistance (spinning ball on a flat substrate).
• Microhardness tester PMT-3M with a load range from 0.0196 N to 4.9 N.
• Precision cutting, grinding and polishing machines for probes preparation.
• Ultrasonic bath for sample pre-cleaning.
• Drying oven (up to 500C) for samples thermal treatment.
Publications:
1. D.A. Karpov, V.N. Litunovsky "Multilayer nanostructures and nanocomposites - a new generation of coatings to modify the surface properties of materials", Review O-103, FSUE “D.V. Efremov Institute of Electrophysical Apparatus”, St. Petersburg, 2008, 93 p. (in Russian).
2. D.A. Karpov, V.N. Litunovsky "Plasma-immersion ion implantation (PIII): physical bases, use in technologies", Review O-104, FSUE “D.V. Efremov Institute of Electrophysical Apparatus”, St. Petersburg, 2009, 65 p. (in Russian).
3. D.A. Karpov, V.N. Litunovsky "Non-traditional technologies of the material surface property modification with concentrated energy fluxes”, Review O-105, FSUE “D.V. Efremov Institute of Electrophysical Apparatus”, St. Petersburg, 2012, 27 p. (in Russian).